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Journal of Microelectromechanical Systems > 2010 > 19 > 6 > 1390 - 1399
Sensors & Actuators: A. Physical > 2004 > 113 > 2 > 226-235
Journal of Microelectromechanical Systems > 2010 > 19 > 6 > 1390 - 1399
Sensors & Actuators: A. Physical > 2004 > 113 > 2 > 226-235