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Journal of Microelectromechanical Systems > 2017 > 26 > 6 > 1400 - 1407
Journal of Microelectromechanical Systems > 2017 > 26 > 6 > 1428 - 1434
Journal of Microelectromechanical Systems > 2017 > 26 > 4 > 926 - 934
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 593 - 600
IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 1 > 1 - 7
IEEE Photonics Journal > 2017 > 9 > 1 > 1 - 7
Journal of Microelectromechanical Systems > 2016 > 25 > 5 > 963 - 967