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In this paper, weighting filters are designed to characterize the performance demands and uncertainty specifications of an ultra precision positioning stage in IC manufacturing. To deal with dynamical uncertainty, the motion principles and structural properties of ultra-precision stage are discussed, and then dynamical parameters of the positioning stage are identified. A feedback controller is synthesis...
Motion control system of an ultra precision positioning stage with application to IC production is presented. Configuration and master/slave principle of ultra precision positioning stage are pictured. By adopting merits of both coarse and fine stage, a desired motion control system having the capacity of large workspace with high resolution of motion is enabled. The automated synthesis procedure...
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