Search results
Journal of Microelectromechanical Systems > 2010 > 19 > 5 > 1197 - 1206
Journal of Microelectromechanical Systems > 2009 > 18 > 6 > 1382 - 1395
Sensors & Actuators: A. Physical > 2008 > 145-146 > Complete > 456-463
IEEE Journal of Selected Topics in Quantum Electronics > 2007 > 13 > 2 > 147 - 154
2006 SICE-ICASE International Joint Conference > 2179 - 2183
2006 SICE-ICASE International Joint Conference > 2168 - 2173