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In this paper, we present a piston-type spatial light modulator (SLM) as a programmable optical pattern generator for maskless lithography. The SLM is a dual-lever-type actuator with pixel-overlapping springs to achieve low voltage actuation with a small capacitor area. Large arrays of up to ~40000 mirrors with 20-mum pixels and ~17000 mirrors with 30-mum pixels have been fabricated. The arrays have...
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