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Journal of Microelectromechanical Systems > 2011 > 20 > 2 > 476 - 486
Journal of Microelectromechanical Systems > 2011 > 20 > 2 > 436 - 440
Journal of Microelectromechanical Systems > 2011 > 20 > 2 > 476 - 486
Journal of Microelectromechanical Systems > 2011 > 20 > 2 > 436 - 440