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Carbonaceous thin films show poor adhesion when deposited on steels. Chromium, titanium, and silicon-containing interlayers are generally used in order to prompt adhesion. This work shows a systematic study of the hydrogen effect on the physical-chemical properties of a-SiCx:H interlayers deposited by using hexamethyldisiloxane on AISI 4140 at low temperatures (85 °C–180 °C). In particular, the effect...
Diamond-like carbon (DLC) is a metastable form of amorphous carbon with attractive properties such as high hardness, low friction, chemical inertness and high wear resistance. In this work, hydrogenated amorphous carbon (a-C:H) thin films were deposited using a plasma enhanced chemical vapor deposition technique by pulsed DC plasma with a simple, low-cost and efficient arrangement of multi-cathodes...
This work reports a systematic study of physical–chemical properties of SiC x :H interlayers deposited by using tetramethlysilane on AISI 4140 at different temperatures (100 °C–550 °C) and its effects on the adhesion of a-C:H thin films. The bi-layers were obtained by pulsed-DC PECVD assisted by electrostatic confinement. The results show that the thickness of the SiC x :H interlayer...
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