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Extraction of accurate capacitance is crucial to construct a proper equivalent circuit for compact and high-frequency devices. This paper proposes a new method for extracting the accurate capacitance using the surface charge induced on the current-carrying conductor. The method is based on the full field analysis by the finite element method, and it is tested using the eddy current.
An equivalent lumped-element circuit model of coaxial TSV is proposed in this paper, in which both frequency- and temperature-dependent elements are extracted using the partial-element equivalent-circuit (PEEC) method. One important aspect of coaxial TSV modelling is its capacitance extraction, in which MOS effects are taken into account. The circuit model is also reduced to a transmission line one,...
An accurate extraction method for series resistance and capacitance based on RF S-parameter measurement in ultraleaky MOS devices is presented in this paper. The method is proven by using a three-element equivalent circuit model for a capacitor and a well-known microwave theory. The proposed method improves the measurement accuracy and significantly reduces the frequency-dependence of capacitance...
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