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The epitaxial BaPbO 3 (BPO) and Pb(Zr,Ti)O 3 (PZT)/BPO films were grown on (001)- and (111)-oriented SrTiO 3 (STO) substrates by RF-magnetron sputtering. With the self-template of BPO buffer layer (deposited at 650°C), BPO main layer and PZT films can be epitaxially grown at temperatures as low as 350 and 475°C, respectively. The (001)-oriented BPO film showed a rougher surface...
Sol-gel-derived epitaxial ferroelectric Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) thin films with varied thicknesses of 40nm-2.4μm were successfully fabricated on LaAlO 3 substrates using inorganic zirconium salt as precursor. Perovskite phase formation was achieved by rapid thermal annealing at 680 o C. Thickness dependence of the structural...
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