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A high-pressure reactive evaporation process and a high-pressure reactive sputtering process have been developed for the growth of high-quality thin films of YBa/sub 2/CU/sub 3/O/sub 7/. Both techniques, when used with heated substrates, are effective in the formation of the 123 phase in situ during the film growth. With reactive evaporation only a cooldown anneal in a higher pressure oxygen ambient...
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