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This study elucidates the application of Pd nanoparticles as catalysts of electroless copper deposition and their catalytic effect on the deposition kinetics and microstructure in an electroless copper bath. Quartz crystal microgravimetry (QCM) and high-resolution field emission scanning electron microscopy (FE-SEM) with energy dispersive X-ray spectroscopy (EDX) demonstrated that the kinetic changes...
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