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This paper presents a comparative study between DC magnetron sputtering (DCMS) and high power impulse magnetron sputtering (HIPIMS) of Al–Si–N. Coatings were synthesised through co-sputtering of Al and Si in a mixed Ar/N 2 . One set of DCMS experiments and one set of hybrid HIPIMS (Al-target)/DCMS (Si-target) experiments were conducted. It was found that a higher partial pressure of N ...
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