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In this study, the numerical investigation was adopted to analyze the deposition characteristic of polycrystalline silicon in a rib reactor. Fluent 6.2 was utilized to simulate the simultaneous momentum transfer, energy transfer and mass transfer, and to couple the gas-phase reaction with surface reaction in SiHC13 -H2 system. Computed flow structure, thermal and species distributions indicated that...
In this work, the excimer-laser-induced crystallization of amorphous silicon (a-Si) films was investigated numerically and experimentally. This study had investigated the effects of irradiating energy density on the grain size and structure by scanning electron microscopy (SEM). In the surface microstructure analysis of the laser-irradiated area, the critical fluences (full-melt threshold, FMT) between...
A theoretical model is proposed in this work for an evaluation of the specific heat and Debye temperature of thin-film semiconductors. In the model, the specific heat contributed by the confined acoustic phonons is calculated first. An effective Debye temperature is then defined by fitting the conventional Debye model to the calculated specific heat. It is found that the so-defined Debye temperatures...
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