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We utilise an inverse eigenvalue analysis technique with perturbation analysis to characterise the sensing performance of two coupled MEMS resonators under manufacturing variability. The analysis derives the operating point, sensitivity, linearity, and mass resolution of the experimentally observed performance of an array of two resonators for both eigenfrequency and eigenvector sensing techniques...
The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection. In this paper, for the first time, we thoroughly summarized and compared different sensitivities of various cantilever structures on mass sensing. Meanwhile, from our analytical results, the expression of the highest sensitivity has...
If a pair of MEMS resonators is electrostatically coupled together, the vibration amplitude ratios at the resonant frequencies of the resulting coupled system are sensitive to stiffness perturbation. An imbalance between the two resonators causes the confinement of vibration energy when the system is resonating, an effect known as mode localization. The degree of localization can be determined by...
Micromachined resonant sensors have been researched for several decades for a variety of applications with potential benefits in terms of improved sensitivity and scalability relative to other transduction principles. Conventional implementations usually involve detection elements monitoring resonant frequency and/or dissipation shift in a single degree-of-freedom or several independent degrees-of-freedom...
In this paper, a new type of microwave fluidic sensor using enhanced coupling peripheral microstrip split-ring resonator is studied in order to analyze the effect of Q-factor and insertion loss with several common liquids. The technique is based on perturbation theory, in which the resonant frequency and Q-factor of the microwave resonator depend on the dielectric properties of the resonator. A Microstrip...
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