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The design of a MEMS continuous ground Single-Pole-Triple-Throw (SP3T) switch that forms an integral part of a MEMS based radar working in the 77 GHz range has been presented. The SP3T RF MEMS switch incorporates 1 input port and 3 output ports. The design is based on electrostatically actuated cantilever beams and unlike other designs, uses a continuous ground that eliminate the effects of coupling...
This paper presents the design optimization and simulation of low-voltage series and capacitive radio frequency (RF) Micro-electromechanical (MEMS) switches using ANSYS Multiphysics. First, a series switch is simulated using shape memory alloy (SMA) which shows that the use of SMA beam to actuate switching, allows the excitation voltage to be relatively much lower (5 V) compared to that needed for...
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