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This study reports on the optimization of garnet-type Li-ion conducting Li5La3Ta2O12 (LLTaO) solid electrolyte thin film growth by CO2-laser assisted chemical vapor deposition (LA-CVD) and the films' detailed structural as well as electrochemical characterization. By adapting the LA-CVD process parameters, high quality LLTaO films with tailored microstructures are successfully grown, which allows...
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