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A novel 3D flash cell array architecture, called "hybrid 3D", is proposed to provide the distinctive low address selection method of stacked channels, suitable for conventional NAND page operation. The strings are composed of GAA type selector and double gate type cells, and their key characters were verified independently. The GAA selectors showed excellent and uniform switching character,...
Various 3D NAND Flash array architectures including P-BiCS, TCAT, VSAT, and VG are critically examined in this work by extensive 3D TCAD simulations. All structures have X,Y lateral scaling limitation since the minimal ONO thickness (~20 nm) and poly channel thickness (~10nm) can not be scaled further. Among them VG may have the best X-direction scalability to F~2X nm node, and no penalty of increasing...
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