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The use of air gaps instead of SiO2 as insulators for through-silicon vias (TSVs) has been demonstrated to reduce the thermal stresses and the TSV capacitance of a 3-D integrated system. However, since the Cu plug in air-gap TSVs lacks support and fixation at the sidewalls, the mechanical strength is a serious concern. This paper for the first time reports the mechanical and humidity reliabilities...
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