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Plasma-exposed Si surface related to Si recess in source/drain region was investigated in detail for various superposed bias configurations with frequencies of 13.56 MHz and 400 kHz. Two different bias powers were utilized by an inductively coupled plasma reactor (ICP). The surface layer (SL) and the interfacial layer between the SL and Si substrate (IL) were analyzed by spectroscopic ellipsometry...
In the new video coding paradigm, Wyner-Ziv (WZ) video coding, or lossy coding of video with decoder side information (SI), SI is involved not only in the decoding of the quantized source, but also in the reconstruction process, so the quality of SI is a key factor to the performance of a WZ video codec. In this paper, an approach to SI estimation for WZ video coding is proposed. It is based on motion...
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