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Die trockenlaufenden Scrollpumpen sind prädestiniert für Prozesse, die ölfreie Pumpvorgänge verlangen, und dort ein adäquater Ersatz für die verbreiteten Drehschieberpumpen, denen sie im Saugvermögen nicht nachstehen. Die dafür erforderliche Trockendichtung ist jedoch fortschreitendem Verschleiß ausgesetzt, für den vor allem die Temperaturverhältnisse in der Pumpe eine große Rolle spielen. Um diese...
The aim of the current paper is the study of the crack resistance of diamond‐like carbon (DCL) coatings deposited by direct current magnetron sputtering (dcMS) and high‐power pulse magnetron sputtering (HPPMS) with different process parameters. For this purpose nanoindentation with a very high force resolution of RFN ≤ 1 nN was used to analyze different a‐C coatings, which were deposited under variation...
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