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This work follows previous studies in which we demonstrated the feasibility of molecular depth profiling with time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS), using a low‐energy Cs+ source for sputtering. Poly(methyl methacrylate) (PMMA), polycarbonate (PC) and polystyrene (PS) thin films were investigated with both 250 eV Cs+ and Xe+ ions with the aim of assessing the role of the ion's...
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