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Surface charge, surface state density and interface recombination behavior on polished float zone (FZ) solar cell substrates were investigated after various wet‐chemical pre‐cleaning procedures and deposition of amorphous silicon (a‐Si:H) or silicon nitride (a‐SiNx:H). Applying surface photo voltage (SPV), microwave detected photo conductance decay (µW‐PCD) and transient microwave conduction (TRMC)...
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