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The reflectance‐time profile of AlN‐on‐Si(111) growth by MOCVD as acquired through an in‐situ optical reflectance monitor is analyzed. It is found that, similar to the case of GaN‐on‐sapphire nucleation and growth through the low temperature GaN or AlN buffer layer techniques, the reflectance profile for AlN‐on‐Si also contains information that relate to the growth mechanism, which can then be correlated...
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