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N‐incorporated Fe48Pt52C composite films were fabricated using a reactive facing‐target sputtering system in a mixture of Ar and N2 gases, and annealed in a chamber with the vacuum of 10−6 Pa. Upon annealing, the escape of N atoms improves the ordering of the face‐centered tetragonal (fct) FePt grains. The coercivity of the 100‐nm thick films increases with the increase of nitrogen partial pressure...
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