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SiO2‐like layers deposited by means of the developed atmospheric pressure glow‐like DBD assisted CVD technology exhibit remarkable film properties, reported for the first time. The films synthesized in a roll‐to‐roll mode on polymeric webs, are as smooth as the substrate, irrespectively of the precursors (TEOS or HMDSO) and reactive gases (N2 or air) employed. Detailed AFM investigation on film morphology,...
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