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The particle size of polymethylhydrogen siloxane (PHMS) and hexamethyldisiloxane (HMDSO) droplets nebulised into an atmospheric pressure plasma was investigated using laser particle imaging. At low precursor flow rates the volatile HMDSO monomer is shown to be vapourised by the nebulisation process and no discrete aerosol droplets enter the plasma. This results in a standard gas phase PECVD process...
The manner by which plasma polymers grow in the very first stages of deposition is a topic which has been almost overlooked. We show using atomic force microscopy (AFM) and X‐ray photoelectron spectroscopy (XPS) that in the early stages of plasma deposition there are significant differences in the way plasma polymers grow from two amine‐containing compounds onto silicon wafers. By AFM it is shown...
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