Metal implants for orthopedic applications have been in use for a long time. Improvements of the osseointegration behaviour by surface‐changing processes, such as sand blasting or etching, were so far only obtained in empirical studies. It is not yet completely understood which surface chemistry and structure can support the initial cell‐implant response. Electron beam material processing in vacuum has been used successfully for many decades. The method has not been used for the targeted micro‐structuring of implant material surfaces yet. Especially the material processing in vacuum reveals advantages, due to the high affinity of titanium for oxygen. The electron beam structuring process is based on the Surfi‐Sculpt process developed by TWI ‐ The Welding Institute. A repetitive beam overflow establishes in several steps defined microstructures. This study presents the results of the investigation of the Surfi‐Sculpt process of the implant material TiAl6 V4, in particular the influence of different process parameters on the formation of structure height and geometry. Particularly the local alloy composition of the micro‐structured surface is investigated.