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The durability of grazing‐ and normal‐incidence optical coatings has been experimentally assessed under free‐electron laser irradiation at various numbers of pulses up to 16 million shots and various fluence levels below 10% of the single‐shot damage threshold. The experiment was performed at FLASH, the Free‐electron LASer in Hamburg, using 13.5 nm extreme UV (EUV) radiation with 100 fs pulse duration...
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