In this paper we present study of cobalt phthalocyanine (CoPc) thin films deposited on quartz and diamond substrates. The different diamond substrates were obtained using chemical vapour deposition method (CVD). The micro‐Raman scattering spectra of CoPc thin films deposited onto quartz and diamond substrates were investigated in the spectral range 200 – 1800 cm‐1 at room temperature for different wavelengths excitation (488 nm and 785 nm). The Raman modes A1g and B1g are connected with different polymorphic of metallophthalocyanine phase of CoPc thin films deposited on substrates (α and β form). Using confocal and surface Raman mapping we also obtained information on polymorphic phase of CoPc layers deposited on different diamond substrates. We observed both, change and distribution of polymorphic phase of CoPc thin films deposited on the surface. The observed feature can be probably caused by the change of crystalline form of CoPc thin layer and different size of crystallites of the diamond substrates. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)