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This chapter summarizes the recent progress in micro‐ and nano‐electro‐mechanical (NEM) devices for low‐power memory applications. Some of the unique figures of merit of M/NEM memories, such as ultra‐low standby power, robustness in harsh environments, potential to be co‐integrated with silicon CMOS, in both front‐end and back‐end, long‐term retention and voltage scaling, are illustrated with the...
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