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Defect engineering of 2D transition metal dichalcogenides (TMDCs) is essential to modulate their optoelectrical functionalities, but there are only a few reports on defect‐engineered TMDC device arrays. Herein, the atomic vacancy control and elemental substitution in a chemical vapor deposition (CVD)‐grown molybdenum disulfide (MoS2) monolayer via mild photon irradiation under controlled atmospheres...
In article number 1908147, Myung‐Han Yoon, Kayoung Lee, Moon‐Ho Ham, and co‐workers present the atomic vacancy control and elemental substitution in a chemical vapor deposition‐grown molybdenum disulfide (MoS2) monolayer via mild photon irradiation. The atomic‐resolution scanning transmission electron microscopy directly confirms that sulfur vacancies and oxygen substituents are generated in the MoS...
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