The formation of volatile fluorides of nonvolatile elements in the presence of the fluorine-bearing additive ZnF2 in the electrode crater of a direct-current arc was confirmed experimentally. It was shown that the use of fluorination reactions in the electrode crater lowers the detection limits of hardly volatile elements in aluminum and zirconium oxides by 1–1.5 orders of magnitude. It was also shown using the analysis of fullerene as an example that fluorination reactions can be used to standardize the procedures for determining impurities in different matrices similar in composition and temperature parameters using the same reference samples.