Abstract The polymerization behavior of 3-aminopropyltriethoxysilane, a process initiated by water molecules, has been examined using time-resolved near-IR and 2D near-IR correlation spectra. By deconvolution of the time-resolved near-IR spectra, the existence of the component bands at 5189, 5265 and 5300cm1, whose intensities decrease markedly as the reaction proceeds, has been confirmed in the 50005400cm1 region. The band at 5189cm1 has been assigned to water molecules, while those at 5265 and 5300cm1 have been assigned to the strongly and weakly associated silanol groups, respectively. The kinetics of the hydrolysis of the ethoxy groups and of the formation of a siloxane bond have been analyzed using the time-dependent integral intensities of these three bands and the mechanisms of the reactions have been discussed. Evidence for this polymerization process is also clearly evident in the 2D near-IR correlation spectra.