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Abstract. We have successfully prepared highly c-axis-textured LiNbO3 films on hydrogen-terminated Si(111) substrate using sol-gel spin-coating and rapid thermal annealing. These highly c-axis-textured films were obtained with a preheating at 300C for 15min followed by a rapid thermal annealing at 500700C for 120s. The c-axis orientation of the LiNbO3 film is due to a weak effect caused by the 3-fold symmetry match between the film and the Si(111) substrate. The c-axis orientation of LiNbO3 films is very useful in integrated optics devices and metalferroelectricsemiconductor nonvolatile memory applications.