Thin films of the LixLa2/3+yTiO3- perovskite (with 0.5) were deposited by the laser ablation technique from Li0.33La0.56TiO3 targets. Their growth onto MgO substrateswas studied as afunction of the oxygen pressure. For films grown in vacuum (10-6mbar), aLa0.63TiO2.5 composition was obtained, meaning that Ti3+ alone is present in the films, while Li ions are not incorporated under these conditions. This material shows good electric conductivity (=500mcm). By contrast, insulating films with aLi0.1La0.70TiO3 composition corresponding to the Ti4+ species were obtained at high oxygen pressures (0.05mbar). For all conditions, textured films were grown with different orientations depending on the temperature and the oxygen pressure.