Electronic Materials: Science & Technology > Electroceramic-Based MEMS > Applications and Devices > 49-79
Source
Identifiers
series ISSN : | 1386-3290 |
book ISBN : | 978-0-387-23310-9 |
book e-ISBN : | 978-0-387-23319-2 |
DOI | 10.1007/0-387-23319-9_4 |
series ISSN : | 1386-3290 |
book ISBN : | 978-0-387-23310-9 |
book e-ISBN : | 978-0-387-23319-2 |
DOI | 10.1007/0-387-23319-9_4 |