The results of studying the structure and phase composition of the surface layer of commercial pure VT1-0 titanium treated with compression plasma flows in nitrogen atmosphere and annealed in the temperature range of 400–900°C for 1 h are presented. Using the X-ray diffraction method, the α-Ti(O) solid solution is found to form in the titanium surface layer at 500°C, without pretreatment with plasma, and to transform into the titanium oxide TiO2 (rutile) phase at 600°C. Pretreatment of titanium with compression plasma flows promotes the formation of α-Ti(N) solid solution decreasing the rate of surface oxidation and increasing the initial temperature of rutile formation to 700°C, which indicates enhancement of the thermal stability of this structure.