Temperature plays a critical role in the reliability of radio-frequency micro-electro-mechanical systems (RF MEMS) switches. The focus of this paper to realize temperature-stable capacitive-type RF MEMS switch. We report design, FEA-based modeling and thermal characterization at different ambient temperature. Experimental result suggests that presented switch topology is temperature stable and stress tolerant. Measurement up to $$100\,^{\circ }{\text {C}}$$ 100 ∘ C shows variation of $$0.03 \,{\text {V}}/^{\circ }{\text {C}}$$ 0.03 V / ∘ C in the pull-in and pull-up voltages. In addition, RF and the dynamic response of these switches are also measured and presented. These MEMS switches need 6.5 V for actuation. The mechanical resonant frequency and quality factor are measured to be 10.7 kHz and 1.16, respectively. The measured switching and release times are $$36\,\upmu {\text {s}}$$ 36 μ s and $$20\,\upmu {\text {s}}$$ 20 μ s , respectively. The experimental results suggest that the presented MEMS switch is a suitable choice for RF applications at elevated temperature.