The On-machine measurement (OMM), which measures a workpiece during or after the machining process in the machining center, has the advantage of measuring the workpiece directly within the work space without moving it. However, the path generation procedure used to determine the measuring sequence and variables for the complex features of a target workpiece has the limitation of requiring time-consuming tasks to generate the measuring points and mostly relies on the proficiency of the on-site engineer. In this study, we propose a touch-probe path generation method using similarity analysis between the feature vectors of three-dimensional (3-D) shapes for the OMM. For the similarity analysis between a new 3-D model and existing 3-D models, we extracted the feature vectors from models that can describe the characteristics of a geometric shape model; then, we applied those feature vectors to a geometric histogram that displays a probability distribution obtained by the similarity analysis algorithm. In addition, we developed a computer-aided inspection planning system that corrects non-applied measuring points that are caused by minute geometry differences between the two models and generates the final touch-probe path.