In this paper, a sliding mode control with perturbation estimation (SMCPE) coupled with an inverse hysteresis compensator is proposed for the motion tracking control of a microposition system with piezoelectric actuation. The inverse hysteresis compensator is employed to cancel the hysteresis nonlinearity, thus reducing the nonlinear system to a linear system with an inversion error. Then, a SMCPE controller is adopted to deal with all the unmodeled dynamics and disturbances, aiming at improving the dynamic performance and the robustness of system. An experiment of a piezoelectric actuator is presented to demonstrate the feasibility and effectiveness of the proposed control scheme. The result shows that for a fast-rate control input, the proposed method is capable of leading to a good performance of system behavior.