Predominantly (012)-oriented BiFeO3 (BFO) film was obtained on Pt(111)/Ti/SiO2/Si substrate using a metal organic decomposition process at 480 °C. The thickness of each layer can reach to about 150 nm. Negatively imprinted and obvious constricted phenomena can be observed in P–E hysteresis loop of the film. The leakage measurement was adopted as an effective way to deaging the partially aged sample. The dominant leakage mechanism involved in the BFO film was investigated. The influence of testing process on the distribution of oxygen vacancies and defect complexes was discussed. Obvious differences can be exhibited in fatigue performance for the partially aged and deaged sample. The dependence of fatigue properties on the test frequencies and applied electric fields was studied both for aged and deaged samples.