This paper demonstrates the process of micro electro-discharge machining (micro EDM) assisted with high-frequency vibration machining micro holes and linear grooves which are straight or inclined on WC/8 % Co (MA) and WC/15 % TiC/6 %Co (MB) cemented carbide cutting tool rake face or scrap reeling slot. Low-voltage sensing contact is introduced to determine the exact position of holes and grooves. Morphology of textured regions is examined and the elemental chemical composition of close proximity region to a straight hole is identified. Results show that micro holes and linear grooves with high dimension accuracy and exact position are machined as expected by micro EDM assisted with high-frequency vibration. There is no debris accumulating around the cavities. Materials of MA cutting tool adhere on the micro tool electrode slightly, while the dimension of adhesion position becomes constant after 3 μ holes are finished. However, the adhesion does not occur during machining MB cutting tools. The distance of edges of grain refinement regions and areas where elemental chemical composition varies to the contour of the hole is no more than 15 μm.