In this paper were investigated the structure of globular and cauliflower-like diamond particles obtained by HFCVD from methane-hydrogen gas mixture. It is established sphaerocrystalline structure. For understanding of principles of diamond growth were analysed various models of the nucleation. On the reason of the surface structure was suggested the mechanism of growth CVD diamond which is conditioned by the formation clusters in vapor phase, following deposition on the surface of diamond particles and coalescence by them. It is characterised the dispersion of ballas-type and cauliflower-like diamond films.