AbstractStable, uniform and cross-linked silicone films have been synthesized by pulsed laser ablation deposition (PLAD) for the first time. A KrF excimer (248 nm) laser was used in the synthesis. The effect of incident energy density on the deposited film chemistry was examined in depth. The surface analysis showed that at low energy densities (100150 mJ/cm2), smooth, hydrophobic films similar in structure to the starting cross-linked silicone elastomer were obtained. Beyond 200 mJ/cm2, hydrophilic films with oxygen contents much higher than the starting polymer were obtained. These films also exhibited a more particulate texture suggesting ablation of particles and/or polymeric clusters from the silicone target. The results demonstrate that the PLAD process may prove valuable for the preparation of cross-linked silicone thin films with tailored properties.