In the structure of the fuel cells (FC) catalyst is one of the most responsible elements. Especially important catalyst in low-temperature FC, to whom FC with proton exchange membrane fuel cell (PEMFC). In addition to the need for effective functioning at room temperatures, catalysts must ensure the longevity of work in conditions of aggressive impacts electrolyte and reaction products in FC. This communication presents the results of research and development of Pt catalysts on the surface of the silicon electrodes and inner surface since porous Si electrodes of micro FC. Structural characteristics of Pt cluster on the Si surface researched using optical and scanner managed by electron microscopy, and x-ray analysis. It is shown that placing Pt directly on the surface of the Si does not provide the necessary durable electrodes. Suggested before generating catalytic layer Pt handle Si surface primer. New technology has demonstrated high electro-catalytically activity Si electrodes for more than 700 h of observation.