Springer Series in Advanced Microelectronics > High Dielectric Constant Materials > Transition to High-k Gate Dielectrics > 521-566
Source
Identifiers
series ISSN : | 1437-0387 |
book ISBN : | 978-3-540-21081-8 |
book e-ISBN : | 978-3-540-26462-0 |
DOI | 10.1007/3-540-26462-0_17 |