Compliant mechanisms with embedded direct-driven actuators are gaining a wide interest in manufacturing systems as well as structural systems. In this paper, we present a procedure for motion analysis of a compliant mechanism which is driven by three embedded piezoelectric actuators with a general-purpose finite element system, in particular, ANSYS. This includes finite element modeling of the piezoelectric actuator and finite element modeling of the compliant mechanism. An experimental validation was conducted, which shows that the model is highly accurate. The contribution of this paper is a novel application of finite element methods with multidisciplinary elements to motion and stress analysis of compliant mechanisms with embedded piezoelectric actuators. In the current literature, for a complaint mechanism, either the piezoelectric actuator is modeled with absence of piezoelectric effects or a pseudo rigid body approach is applied with poor accuracy. Another contribution lies in the use of a general-purpose finite element software system, which will greatly increase the generalization of finite element modeling applications.