NATO Science Series II: Mathematics, Physics and Chemistry > Nanostructured Thin Films and Nanodispersion Strengthened Coatings > Recent Progress in the Development of Plasma Deposition Equipment > 137-146
Source
Abstract
Identifiers
series ISSN : | 1568-2609 |
book ISBN : | 978-1-4020-2220-3 |
book e-ISBN : | 978-1-4020-2222-7 |
DOI | 10.1007/1-4020-2222-0_13 |