Ions of gold monomer and clusters emitted from a liquid metal ion source were mass-selected, and deposited on cleaved HOPG (highly oriented pyrolytic graphite) surfaces and on amorphous carbon thin films at room temperature with the impinging energy E i from 0 to 500 eV. The coverage of deposited ions were 1/100 and 1/1000 monolayers on HOPG surfaces and 1/3 monolayers on carbon films. Scanning tunneling microscopy of the HOPG surfaces deposited with low impinging energy (E i<50 eV) revealed that large clusters with diameters ranging from 2 to 5 nm and height of 1–2 layers were present instead of isolated monomers and original clusters. When E i was higher than 100 eV, HOPG surfaces were damaged and only bumpy surfaces were observed by STM. Transmission electron microscopy of Au+-deposited carbon films showed the formation of clusters with diameter 0.5–20 nm, depending on the E i and the time elapsed after deposition.