The depth of the gas-saturated layer of titanium in the process of one-component thermodiffusion saturation with interstitial elements (nitrogen, oxygen, or carbon) is analytically estimated. The kinetic specific features of the two-component diffusion saturation of titanium from rarefied nitrogen-and-oxygen-containing atmospheres are determined. These features are explained by the influence of oxygen on the solubility and diffusivity of nitrogen. It is shown that, for certain temperature and time parameters, the curve of nitrogen distribution is not monotonic and the maximum concentration is recorded not on the surface of titanium but in a region located at a certain distance from the surface.